DIAPHRAGM STRUCTURE

摘要

A diaphragm structure with a first substrate (10a) including a first surface (12a) with an annular groove therein and a second opposing surface with an annular groove (30a, 32a) on each side of annular groove in the first surface defining a first diaphragm. (18a) A second substrate (10b) also includes a first surface with an annular groove therein (14b) and a second opposing surface with an annular groove on each side of the annular groove in the first surface defining a second diaphragm. (18b) A diaphragm overload stop (40a) is located behind the first and second diaphragms.