Component, has sensor chip, which is installed on base and surface of base is provided with moisture-impermeable coating in certain areas

摘要

The component (10) has a sensor chip (1), which is mounted on a base (2). The surface of the base is provided with a moisture-impermeable coating (8) in certain areas. Particularly, cutting, breaking and milling edges of the base are provided with a moisture-impermeable coating. The moisture-impermeable coating is formed by a glue layer or a lacquer coat. The sensor chip is mounted on a glass base, where the glass base is coated with a silane compound in certain areas. The component concerns silane compound of general formulae (I-VIII). An independent claim is also included for a micromechanical pressure sensor, particularly with piezo-resistance integrated in the sensor chip for signal detection. The silane compound having general formulae (I-VIII). R-SiX3 (I) R-Si(X)2Me (II) R-Si(X)Me2 (III) R2-SiX2 (IV) R3-SiX (V) X3Si-Rc-SiX3 (VI) X3Si-Rc-SiX3 (VII) (X)Me2Si-Rc-Si(X)Me2 (VIII) In formula (I)X=fluoro, chloro, bromo, methoxy, ethoxy, isopropoxy, alkoxy or acetoxy. In formula (II) X : same as variable group X of formula (I); and Me : methyl. In formula (III) X : same as variable group X of formula (I); Me2 : dimethyl; and R : Rf-Rb, 1-30C alkyl, isopropyl, tert-butyl, 1-4C alkyl monochlorinated or monoalkoxyalkyl, arylalkyl or aryl=phenylethyl, naphtyl, 2-methyl-2-phenylethyl, 4-phenylbutyl, pentafluorphenyl, phenyl, phenethyl, perfluoropolyether, allyl or 3-acryloxypropyl, aminopropyl, methacryloxymethyl, vinyl, where Rf=perfluoroethyl, butyl, hexyl, octyl, decyl, methyl and Rb=ethyl or methyl, 1,1,2,2 tetrahydroperfluoroctyl or 3,3,3-trifluoropropyl. In formula (IV) X : same as variable group X of formula (I); and R : R=Rf-Rb, arylalkyl or aryl=phenylethyl, naphtyl, pentafluorophenyl, phenyl, 1-4C, isopropyl, tert-butyl, isobutyl, where Rf=perfluoroethyl, butyl, methyl and Rb=ethyl or methyl as 3,3,3-trifluoropropyl. In formula (V) X : same as variable group X of formula (I); and R : Rf-Rb, alkyl, 1-4C, isopropyl, arylalkyl or aryl=phenyl, where Rf = perfluorethyl, butyl, methyl and Rb=ethyl and methyl, e.g. 3,3,3-trifluoropropyl. In formulae (VI) X : same as variable group X of formula (I); and Rc : methyl, ethyl, propyl, butyl, bifunctional perfluoropolyether. In formula (VII) X, Rc : same as variable group X, Rc of formula (VI); and Me : methyl. In formula (VIII) X, Rc : same as variable group X, Rc of formula (VI); and Me2 : dimethyl.