IMAGE PROCESSING SYSTEM AND SCANNING ELECTRON MICROSCOPE SYSTEM

摘要

PROBLEM TO BE SOLVED: To achieve pattern matching processing having high speed processing by obtaining processing for simply performing registration of a template supposing that size is varied and position precision sufficient in measurement in pattern matching for specifying a measurement position.

SOLUTION: An image processing system has a means for automatically calculating the size and position of the template for positioning different from the measurement position itself when designating the measurement position, and displays the size and position of the calculated template. In addition, the image processing system has a means for performing structure matching for extracting a similar matter with original position relationship by performing the pattern matching by using all or some of a plurality of divided templates.

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