METHOD AND APPARATUS FOR EFFICIENTLY OPERATING A GAS DISCHARGE EXCIMER LASER

摘要

Systems and methods for efficiently operating a gas discharge excimer laser (10) are disclosed. The excimer laser (10) may include a chamber (12) containing laser gases, first and second electrodes (34, 38) within the chamber (12), and a plurality of reflective elements (22, 24) defining an optical resonant cavity. The method may include setting the laser gases to a first pressure; after setting the gases to the first pressure, applying a first voltage to the electrodes (34, 38), thereby propagating a laser beam in the optical resonant cavity; measuring energy of the beam; adjusting the first voltage until the energy of the beam is substantially equal to a target pulse energy; operating the laser (10) for an amount of time; after the amount of time, measuring energy of the beam; and changing the pressure of the gases to a second pressure different from the first pressure.