发明名称 |
METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA |
摘要 |
A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.
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申请公布号 |
US2008243433(A1) |
申请公布日期 |
2008.10.02 |
申请号 |
US20080059435 |
申请日期 |
2008.03.31 |
申请人 |
RAVID ABRAHAM;SWEDEK BOGUSLAW A;BENVEGNU DOMINIC J;DAVID JEFFREY DRUE;QIAN JUN;HUEY SIDNEY P;CARLSSON INGEMAR;KARUPPIAH LAKSHMANAN;LEE HARRY Q |
发明人 |
RAVID ABRAHAM;SWEDEK BOGUSLAW A.;BENVEGNU DOMINIC J.;DAVID JEFFREY DRUE;QIAN JUN;HUEY SIDNEY P.;CARLSSON INGEMAR;KARUPPIAH LAKSHMANAN;LEE HARRY Q. |
分类号 |
G01B5/06 |
主分类号 |
G01B5/06 |
代理机构 |
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地址 |
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