| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method capable of realizing more accurate inspection of the existence of a normal condition in processing of a thin plate, as compared to the conventional techniques and using a more accurate inspecting means, and to provide a manufacturing apparatus that corresponds thereto. <P>SOLUTION: A detection beam (29) is emitted to a thin plate (11) to be processed, and then the detection beam (29) is received. The detection beam (29) and the thin plate (11) to be processed are relatively moved in the lateral direction of the detection beam (29) by a detecting action. An edge section (31) of each of thin plate openings (28, 35, 37, 41) is detected by means of the detection beam (29), during the detecting action at a position prescribed by the detection beam (29) and the thin plate (11). Geometrical actual states for each of the thin plate openings (28, 35, 37, 41) are determined, based on the detected result, so that determined geometrical actual states for each of the thin plate openings (28, 35, 37, 41) are compared to a corresponding target state. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
