single crystal substrate manufacturing method and the single crystal substrate,申请号KR20070018853-传众专利搜索

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发明名称	single crystal substrate manufacturing method and the single crystal substrate
摘要
申请公布号	KR100861478(B1)	申请公布日期	2008.10.02
申请号	KR20070018853	申请日期	2007.02.26
申请人		发明人
分类号	H01L21/20;H01L21/302	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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