| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for quantitatively acquiring a really necessary drying time. SOLUTION: The quantity w of allowed sticking water is set in ST01. The w is substituted for a second expression to determine a second pressure p2 (ST02). A wet workpiece is vacuum-dried (ST05), and a third pressure p3 is measured (ST08). If the third pressure p3 is the second pressure p2 or lower, it is determined to be accepted (ST10), and if not, it is determined to be not accepted (ST11). During vacuum drying, the degree of vacuum (the third pressure) is measured, and if this pressure is on the higher vacuum side than a criterion pressure (the second pressure), it is determined that drying is satisfactorily completed. The criterion pressure is predetermined from the performance of a sealed container and a vacuum pump and the quantity of the allowed sticking water. The criterion pressure thereby has an excellent correlation with the really necessary drying time. Consequently, the really necessary drying time can be quantitatively acquired. COPYRIGHT: (C)2009,JPO&INPIT
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