发明名称 |
METHODS OF FORMING PLURALITIES OF CAPACITORS |
摘要 |
<p>The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes within a capacitor array area over a substrate. The capacitor electrodes comprise outer lateral sidewalls. The plurality of capacitor electrodes is supported at least in part with a retaining structure which engages the outer lateral sidewalls. The retaining structure is formed at least in part by etching a layer of material which is not masked anywhere within the capacitor array area to form said retaining structure. The plurality of capacitor electrodes is incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.</p> |
申请公布号 |
EP1859476(A1) |
申请公布日期 |
2007.11.28 |
申请号 |
EP20060736182 |
申请日期 |
2006.02.27 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
SANDHU, GURTEJ, S.;DURCAN, MARK, D. |
分类号 |
H01L21/02;H01L27/08;H01L27/10;H01L29/92;H01L49/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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