| 发明名称 |
MULTILAYER STRUCTURE, ELECTRODE FOR ELECTRICAL CIRCUIT USING SAME, AND METHOD FOR PRODUCING SAME |
| 摘要 |
<p>A multilayer structure including a transparent conductive thin film and a molybdenum metal thin film wherein difference of internal stress between the transparent conductive thin film and the molybdenum metal thin film is 1600 MPa or less.</p> |
| 申请公布号 |
EP1975273(A1) |
申请公布日期 |
2008.10.01 |
| 申请号 |
EP20070706733 |
申请日期 |
2007.01.15 |
| 申请人 |
IDEMITSU KOSAN CO., LTD. |
发明人 |
UMENO, SATOSHI;HONDA, KATSUNORI;INOUE, KAZUYOSHI |
| 分类号 |
C23C14/06;B32B9/00;B32B15/04;G02F1/1343 |
主分类号 |
C23C14/06 |
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