| 摘要 |
A dielectrophoretic device is provided to generate stable negative dielectrophoresis simply by having a 3D electrode structure. A dielectrophoretic device including 3D electrode structure includes a lower substrate(10), a first electrode(20), a spacer(30), an upper substrate(40), and a second electrode(50). The first electrode is a band-type in shape and formed on the lower substrate. The spacer is formed on the lower substrate and contains fluid including predetermined dielectric particles. The upper substrate is formed on the spacer and covers the lower substrate. The second electrode is made of ITO(Indium Tin Oxide) and formed partially beneath the upper substrate.
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