DIFFRACTION GRATING AND FABRICATION TECHNIQUE FOR SAME,申请号EP19990969153-传众专利搜索

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发明名称	DIFFRACTION GRATING AND FABRICATION TECHNIQUE FOR SAME
摘要
申请公布号	EP1119784(A4)	申请公布日期	2008.10.01
申请号	EP19990969153	申请日期	1999.09.08
申请人	CYMER, INC.	发明人	OZARSKI, ROBERT, G.;CROWLEY, JOHN, L.
分类号	G02B5/18;G03F7/20;(IPC1-7):G02B5/18	主分类号	G02B5/18
代理机构		代理人
主权项
地址

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