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发明名称
PLASMA ETCHING METHOD AND COMPUTER-READABLE STORAGE MEDIUM
摘要
申请公布号
KR100861260(B1)
申请公布日期
2008.10.01
申请号
KR20070066809
申请日期
2007.07.04
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
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