| 摘要 |
A stage assembly ( 220 ) that moves a work piece ( 200 ) a movement step ( 257 ) includes a first stage ( 238 ), a first mover assembly ( 242 ), a second stage ( 240 ), and a second mover assembly ( 244 ). The first mover assembly ( 242 ) moves the first stage ( 238 ) with a first acceleration profile ( 366 ) during the movement step ( 257 ) and the second mover assembly ( 244 ) moves the second stage ( 240 ) with a second acceleration profile ( 368 ) during the movement step ( 257 ) that is different than the first acceleration profile. For example, the second mover assembly ( 244 ) moves the second stage ( 240 ) during the movement step ( 257 ) with a higher maximum acceleration than the first mover assembly ( 242 ) moves the first stage ( 238 ) during the movement step ( 257 ). Further, the second mover assembly ( 244 ) moves the second stage ( 240 ) during the movement step ( 257 ) with a higher average acceleration than the first mover assembly ( 242 ) moves the first stage ( 238 ) during the movement step ( 257 ).
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