COOLING JACKET OF EXHAUST GAS PIPE IN SEMICONDUCTOR PRODUCTION

摘要

A cooling jacket for a gas exhaust pipe in semiconductor manufacturing equipment is provided to enhance cooling efficiency by circulating cooling water. A cooling jacket has a structure for surrounding an exhaust line for exhausting an exhaust gas of high temperature. The cooling jacket includes a cooling water pipe(10) for receiving and discharging cooling water. The cooling water pipe is arranged in a zigzag pattern on a constant area around the exhaust line. The cooling wafer pipe has a buried structure of an entire section except for an inlet(12) and an outlet(13) within a plate-shaped silicon rubber body(11). A finishing sheet(14) is attached on both sides of the silicon rubber body including the cooling water pipe.