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发明名称
摘要
申请公布号
JP4156008(B2)
申请公布日期
2008.09.24
申请号
JP20070034309
申请日期
2007.02.15
申请人
发明人
分类号
H01L21/8234;H01L21/283;H01L27/088;H01L29/423;H01L29/49;H01L29/78
主分类号
H01L21/8234
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