| 摘要 |
Detection accuracy of flow rates is higher even when the temperature of fluid is varied or when there is any difference between temperature of fluid and that around a thermosensible flow sensor. A thermosensible detector element comprises an insulating support film formed on the surface of a plate-like substrate, a heat resistor and a fluid temperature-measuring resistor made of thermosensible resistive films formed on this support film, an insulating protective film formed on this thermosensible resistive film, and cavities and formed under respective thermosensible resistive films by removing partially the plate-like substrate, and in which flow velocity of fluid is measured on heat transfer phenomenon from the portion heated by the heat resistor to fluid, and top surface of the cavity located under the fluid temperature-measuring resistor is formed within the part where the fluid temperature-measuring resistor is located.
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