发明名称 |
INTEGRAL MICROMECHANICAL GYROSCOPE-ACCELEROMETER ON BASIS OF CARBON NANOTUBES |
摘要 |
FIELD: technological processes; physics. ^ SUBSTANCE: device contains semi-conductor base with five fixed electrodes, four movable electrodes that are made in the form of plates with comb structures that form condensers with fixed electrodes and that are connected with base by means of elastic beams that are made on the basis of carbon nanotubes, inertial mass, which is installed with clearance in relation to base and with a layer of additional inertial mass applied on it. ^ EFFECT: increase of measurement accuracy. ^ 2 dwg |
申请公布号 |
RU2334237(C1) |
申请公布日期 |
2008.09.20 |
申请号 |
RU20070114439 |
申请日期 |
2007.04.16 |
申请人 |
TEKHNOLOGICHESKIJ INSTITUT FEDERAL'NOGO GOSUDARSTVENNOGO OBRAZOVATEL'NOGO UCHREZHDENIJA VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "JUZHNYJ FEDERAL'NYJ UNIVERSITET" V G. TAGANROGE (TTI JUFU) |
发明人 |
KONOPLEV BORIS GEORGIEVICH;LYSENKO IGOR' EVGEN'EVICH;POLISHCHUK ELENA VIKTOROVNA |
分类号 |
G01C15/08;G01P15/08;G01C19/56;G01C19/5656 |
主分类号 |
G01C15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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