| 摘要 |
PROBLEM TO BE SOLVED: To provide a deodorization device that produces ozone by an amount suitable for removal of the odor of a gas produced from processing liquid, without having to use complex control. SOLUTION: The deodorization device 40 has an ozone-producing unit 41 and an ozone reaction unit 42 which deodorizes odorous gas produced by an odorous gas producing unit with ozone-produced by the ozone-producing unit 41. The ozone-producing unit 41 and ozone reaction unit 42 are partitioned with a partition wall 40W, and either one of them is equipped with a temperature-adjusting mechanism 43 which adjusts the ambient temperature, and a temperature control unit which controls the temperature of the ozone producing unit 41 to a temperature lower than the temperature of the ozone reaction unit 42. COPYRIGHT: (C)2008,JPO&INPIT
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