发明名称 SURFACE ACOUSTIC WAVE DEVICE
摘要 PURPOSE:To improve the electricity-machine energy converting efficiency, by using a lithium borate single crystal to a substrate and at the same time setting the propagating direction of an acoutic wave in a fixed range. CONSTITUTION:An Li2B4O7 single crystal is produced by a draw-up process and then cut with a proper thickness to receive the specular polishing. An electrode film is formed on the mirror surface by a vacuum depositing process. For the propagating direction of a surface acoustic wave, lambda=-30-30 deg., mu=8-32 deg. and theta=-30-30 deg. are set when the Euler angle display is set at (90 deg.+lambda, 90 deg.+mu, 90+theta). The propagating direction corresponds to the cutting direction of the single crystal. In this connection, the cutting angle is set within a range of the prescribed Euler angle. Thus it is possible to set the electricity-machine coupling coefficient K<2> at >=1.5%.
申请公布号 JPS58179014(A) 申请公布日期 1983.10.20
申请号 JP19820062963 申请日期 1982.04.15
申请人 TOKYO SHIBAURA DENKI KK 发明人 FUKUDA KATSUYOSHI;SUZUKI HITOSHI;MATSUMURA SADAO
分类号 H03H9/25;H01L41/00;H03H3/08;H03H9/02 主分类号 H03H9/25
代理机构 代理人
主权项
地址