发明名称 |
DISK-SHAPED SUBSTRATE MANUFACTURING METHOD AND WASHING APPARATUS |
摘要 |
The disk-shaped substrate manufacturing method is provided with: scrub-washing a first surface and a second surface of a disk-shaped substrate by respectively using a first porous roller and a second porous roller that have a cylindrical shape and are rotationally driven. The process of the scrub-washing determines a distance between axes of the first porous roller and the second porous roller that sandwich the disk-shaped substrate in between, and performs scrub-washing while the determined distance between the axes is under control.
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申请公布号 |
US2008223402(A1) |
申请公布日期 |
2008.09.18 |
申请号 |
US20080046103 |
申请日期 |
2008.03.11 |
申请人 |
SHOWA DENKO K.K.;CITIZEN SEIMITSU CO., LTD. |
发明人 |
HANEDA KAZUYUKI;KOBAYASHI MASAHIKO;TOYAMA YUKINAKA |
分类号 |
B08B1/04;B08B13/00 |
主分类号 |
B08B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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