| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a foreign matter inspection device which surely detects foreign matters of micron orders on a substrate-like specimen along its position data, efficiently performs high-reliability analysis, without the need for collecting the foreign matters from the specimen to identify and analyze the same, and can surely detect and analyze, especially the foreign matters of a fine organic material, and to provide a foreign matter inspection method. <P>SOLUTION: The foreign matter inspection device has a detection means for measuring the surface unevenness of the substrate like specimen to detect foreign matter, a marking means for applying a recessed part to the surface of the specimen of a specific horizontal distance from the foreign matter and a mass spectrum measuring means for irradiating the surface of the specimen with primary ion beam to scan the surface of the specimen to detect the recessed part and measuring the secondary ions discharged from the position of a specific horizontal distance from the recessed part. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
