| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a stamper for an optical disk having high exposure sensitivity, even when an inorganic resist composed of an oxide of a transition metal is used and high transmittance of UV or a visible light, after exposure development. <P>SOLUTION: Highly sensitive exposure by a visible laser having nearly 405 nm wavelength is made possible by providing a rare earth metal film 103 between a transparent substrate 101 and an inorganic resist film 104. Since hydrogen diffuses into the rare earth metal film, from a hydrogen containing dielectric film 102, after exposure and transmittance of UV or visible light in the rare earth metal film is enhanced, irradiation with UV from a stamper side becomes possible. <P>COPYRIGHT: (C)2008,JPO&INPIT |
