| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro pump device used for a microfluid device considerably simply formed, easily manufacturable, and having enhanced gas generating efficiency for feeding a liquid. SOLUTION: In this micro pump device 10, a gas generating chamber 11 is formed in a substrate 2. The gas generating chamber 11 is opposed to an optical window 12. An optical response gas generating member 13 generating a gas when light is applied thereto is contained in the gas generating chamber 11. An optical response gas generating resin composition generating the gas when light is applied thereto is adhered to the support member of the optical response gas generating member 13. The optical response gas generating member has a large number of gas flow passages each having an outer surface from which the gas generated when the light is applied thereto is discharged. COPYRIGHT: (C)2008,JPO&INPIT
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