| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein precision in measurement is low when measuring the amount of positional misalignment in a conventional measuring method. SOLUTION: Respective patterns 10a, 10b, 10c, 10d for measurement are used for a method of measuring the relative amount of positional misalignment (the amount of positional misalignment) between wiring and a conductor plug by applying voltage between a pad 22 (first terminal) and a pad 24 (second terminal). The patterns have wiring 12 (first wiring) connected to the pad 22, a via plug 14 (first conductor plug) connected to the wiring 12, and wiring 16 (second wiring) that is provided in the same layer as the wiring 12 while an insulating film (not shown) is sandwiched and the wiring 16 is provided opposite to the wiring 12, and is connected to the pad 24. COPYRIGHT: (C)2008,JPO&INPIT |
