发明名称 FABRICATION METHOD OF PIXEL STRUCTURE AND THIN FILM TRANSISTOR
摘要 A method of fabricating a thin film transistor is disclosed. First, a substrate is provided and a patterned polysilicon layer is formed on the substrate. A metal layer is formed on the patterned polysilicon layer. Then, a portion of the metal layer is removed so that the remaining metal layer beside the patterned polysilicon layer forms a source and a drain. A gate insulation layer is formed on the substrate to cover the source, the drain and the patterned polysilicon layer. A gate is formed on the gate insulation layer over the patterned polysilicon layer.
申请公布号 US2008224144(A1) 申请公布日期 2008.09.18
申请号 US20080129225 申请日期 2008.05.29
申请人 AU OPTRONICS CORPORATION 发明人 TING CHIN-KUO
分类号 H01L33/00;H01L21/00 主分类号 H01L33/00
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