LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser annealing apparatus and laser annealing method which can reduce stripe laser irradiation traces formed at an angle with respect to a scanning direction at the time of laser annealing which are attributable to the coherency of the laser beam itself. SOLUTION: The laser annealing apparatus comprises a laser oscillator 1 for generating a laser beam containing linear polarization components in two or more directions, a beam shaping means which is disposed within the optical path of the laser beam and shapes the laser beam into a desired line beam, and a treatment chamber equipped with a placement table for supporting an object to be laser-annealed at a position where the shaped laser beam is cast. Within the optical path of the laser beam, a wave plate 4 is arranged in such a manner that a perpendicular line to the delay axis of the wave plate 4 and a long axis out of the polarization directions of the laser beam may form a predetermined angle. COPYRIGHT: (C)2008,JPO&INPIT