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发明名称
Optical metrology system
摘要
申请公布号
AU2008224807(A1)
申请公布日期
2008.09.18
申请号
AU20080224807
申请日期
2008.02.05
申请人
LABORATOIRE NATIONAL DE METROLOGIE ET D'ESSAIS;CONSERVATOIRE NATIONAL DES ARTS ET METIERS
发明人
GERARD GENEVES;DARINE HADDAD;PATRICK JUNCAR
分类号
G01B11/02;G01D5/34
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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