| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it is difficult to position a polarization inversion region and an optical waveguide of a conventional optical element. SOLUTION: The manufacturing method of the optical element includes a stage of forming a clad layer 111 in predetermined pattern on a first surface of a ferroelectric substrate 101; a stage of sticking the first surface on a support substrate; plane-polishing a second surface on the opposite side from the first surface to a predetermined thickness; a stage of forming a predetermined electrode pattern on the second surface side which has been polished and forming a periodic polarization inversion region by applying an electric field; a fifth stage of further plane-polishing the second surface side to a predetermined thickness; and a stage of forming a predetermined resist pattern on the second surface side and then performing trench processing by dry etching. Positioning is performed with the pattern of the clad layer formed in the first stage to form the resist pattern, so that the positioning can easily be performed. COPYRIGHT: (C)2008,JPO&INPIT
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