发明名称 ELECTRICAL CONNECTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electrical connecting device which will not cause deficiency in strength to a probe substrate. SOLUTION: The electrical connecting device is provided with a probe substrate spaced from a support member opposed to one surface of the probe substrate. On the one surface of the probe substrate, fixing parts are provided, having screw holes opening upward, and on the other surface of the probe substrate, probes to be connected to a tester are provided. There are provided cylindrical spacers for keeping a distance from the support member to the top of the fixing part, and male screw members screwed into threaded holes for fastening the support member and the probe substrate at intervals corresponding to the length of the spacer. The probe substrate has a support plate with a plurality of conductive paths formed therein which penetrate therethrough in the thickness direction and are connected to the tester, and a wiring plate provided with wiring paths connected to the corresponding conductive paths and the probes corresponding to the conductive paths on the other surface with its one surface fixed on the support plate. The fixed part is constituted with female screw members fixed in a regions where the conductive paths are not formed on the support plate. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008216060(A) 申请公布日期 2008.09.18
申请号 JP20070054259 申请日期 2007.03.05
申请人 MICRONICS JAPAN CO LTD 发明人 KUNIYOSHI SHINJI;KIYOFUJI HIDEHIRO;MIYAGI YUJI;MIURA KIYOTOSHI
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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