发明名称 Termination trench structure for mosgated device and process for its manufacture
摘要 A process for the fabrication of a MOSgated device that includes a plurality of spaced trenches in the termination region thereof.
申请公布号 US2008227269(A1) 申请公布日期 2008.09.18
申请号 US20080011290 申请日期 2008.01.25
申请人 INTERNATIONAL RECTIFIER CORPORATION 发明人 MA LING
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
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