| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor wafer container, wherein a plurality of the semiconductor wafers can be efficiently and safely stored, without causing large intervals to exist between the semiconductor wafers, and at the same time, the semiconductor wafers can be carried in and out in proper manner. SOLUTION: In a wafer holding unit 20, a plurality of single wafer holding sections 21-23 are arranged by being placed one over another. Each of the single wafer holding section includes a wafer placing frame 21 which abuts only against a lower end edge portion on the outer circumference of a semiconductor wafer W; a wafer-fixing frame 22, which is relatively and movably arranged in the vertical direction on the wafer placing frame 21, and abuts only on the upper end edge portion on the outer circumference of the semiconductor wafer W; and a wafer-lifting member 23, which pushes up the semiconductor wafer W from the wafer placing frame 21 to a position separated above from the wafer placing frame and keeps such a state, by moving the wafer fixing frame 22 upward in a state where the wafer fixing frame 22 is evacuated upward to the wafer-placing frame 21. COPYRIGHT: (C)2008,JPO&INPIT
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