| 摘要 |
A scanning electron microscope having a unification control function is provided to control operations of components including a high voltage generator and an electron beam scanning unit by using digital signals. A scanning electron microscope includes an electron gun, an anode separated from the electron gun, a high voltage generator for applying a high voltage to the electron gun and the anode, an electron beam scanning unit for scanning an electron beam to a sample, and a detection unit for detecting secondary electrons reflected from the sample and converting the secondary electrons to electrical signals. The scanning electron microscope further includes a control panel(52) having a plurality of key input parts for operating the high voltage generator and the electron beam scanning unit, an analysis terminal(54) for receiving the electrical signals from the detection unit and displaying an image of the sample on a monitor, and a digital signal processor(58) for controlling operations of the high voltage generator and the electron beam scanning unit by processing drive signals of the high voltage generator and the electron beam scanning unit as digital signals.
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