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发明名称
单晶圆退火处理器
摘要
本发明提出了一种适合用来对基底进行退火制程的热处理器。该处理器具有一密封的制程腔体。空气于制程期间会被隔绝在制程腔体外以避免基底表面氧化,如铜质表面。其系藉由选择性地将该基底置于加热板与冷却板间稳定运作以达成基底温度之控制。晶圆于载入载出期间会通入气流经过该基底,使基底在加热器运作中仍能保持在足够低的温度环境以避免氧化。
申请公布号
TW200837838
申请公布日期
2008.09.16
申请号
TW097106701
申请日期
2008.02.26
申请人
山米工具股份有限公司
发明人
保罗Z 沃尔思
分类号
H01L21/324(2006.01);H01L21/67(2006.01)
主分类号
H01L21/324(2006.01)
代理机构
代理人
林静文
主权项
地址
美国
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