| 发明名称 |
System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS) |
| 摘要 |
A MEMs-based system (and method), includes a sensor array including at least two sensors providing a basis for ensemble averaging.
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| 申请公布号 |
US7426416(B2) |
申请公布日期 |
2008.09.16 |
| 申请号 |
US20040968181 |
申请日期 |
2004.10.20 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SRI-JAYANTHA SRI M.;SHARMA ARUN;DANG HIEN;ELEFTHERIOU EVANGELOS S.;LANTZ MARK A.;POZIDIS CHARALAMPOS |
| 分类号 |
G05B13/02;B81C99/00 |
主分类号 |
G05B13/02 |
| 代理机构 |
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代理人 |
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