发明名称 |
Single-sided inflatable vertical slit valve |
摘要 |
A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber housing. The gate valve includes a sealing door located in the processing region and configured to seal the first opening in the chamber housing; a vertical actuator located outside the chamber housing; a one-sided horizontal actuator located within the processing region and connected to the sealing door; and a valve shaft extending through the second opening in the chamber housing and connecting the vertical actuator to the one-sided horizontal actuator.
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申请公布号 |
US7422653(B2) |
申请公布日期 |
2008.09.09 |
申请号 |
US20040890969 |
申请日期 |
2004.07.13 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BLAHNIK JEFF;KRAUS JOE;RICE MIKE |
分类号 |
C23C16/00;C23F1/00;F16K3/00;F16K25/00;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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