SOLID-STATE IMAGING DEVICE

摘要

A solid-state imaging device including: a plurality of photodiode parts ( 1 ); a plurality of vertical charge transfer parts ( 2 ) each of which reads out a signal charge and transfers the signal charge in a vertical direction; and a plurality of shade films ( 5 ) that have conductivity, which supplies a transfer pulse via the shade film ( 5 ), is used. The vertical charge transfer parts ( 2 ) respectively have transfer channels ( 13 ) and transfer electrodes ( 3 ). The shade film ( 5 ) is formed above the corresponding vertical charge transfer part ( 2 ) via an insulation layer ( 21 ) that insulates the shade film ( 5 ) from the transfer electrodes ( 3 ). The insulation layer ( 21 ) has a thick part ( 8 ) in a part of the insulation layer ( 21 ) where the shade film ( 5 ) is overlapped on a side of the photodiode part ( 1 ) that is a subject to be read out by the vertical charge transfer part ( 2 ).