CONTROL METHODS FOR MICROMIRROR DEVICES IMPLEMENTED WITH A SINGLE ADDRESS ELECTRODE
摘要
<p>A method for controlling a micromirror device including mirror elements each composed of a micromirror supported on a substrate by an elastic hinge, and a address electrode arranged across the deflection axis of the micromirror comprises deflecting the micromirror by changing a potential to a predetermined waveform for the address electrode.</p>
