| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminate showing a sufficient bond of an ultrafine particle material and having a tight tissue, a smooth surface and a uniform density. SOLUTION: The laminate includes a base plate and a brittle fine particle material layer accumulated on the base plate, wherein the brittle fine particle material layer is composed of a plastically deformable particle. Even when a supply amount of the ultrafine particle material for making a film is not stable, since a thickness of a film formed in each film making process is precisely defined in a grinding process, it is possible to control the film thickness at a predetermined value uniformly precisely in a large surface area by repeating the operation. COPYRIGHT: (C)2008,JPO&INPIT
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