发明名称 Solid-state image pickup device and manufacturing method thereof
摘要 A solid-state image pickup device is provided in which a pixel forming region 4 and a peripheral circuit forming region 20 are formed on the same semiconductor substrate, a first element isolation portion is formed by an element isolation layer 21 in which an insulating layer is buried into a semiconductor substrate 10 in the peripheral circuit forming region 20, a second element isolation portion is composed of an element isolation region 11 formed within the semiconductor substrate 10 and an element isolation layer 12 projected in the upper direction from the semiconductor substrate 10 in the pixel forming region 4 and an element isolation layer 21 of the first element isolation portion and the element isolation layer 12 of the second element isolation portion contain the same insulating layers 17, 18 and 19. This solid-state image pickup device has a structure capable of suppressing a noise relative to a pixel signal and which can be microminiaturized in the peripheral circuit forming region.
申请公布号 US2008210997(A1) 申请公布日期 2008.09.04
申请号 US20080150506 申请日期 2008.04.29
申请人 SONY CORPORATION 发明人 YOSHIHARA IKUO
分类号 H01L27/146;H01L21/76;H04N5/335;H04N5/361;H04N5/369;H04N5/374;H04N101/00 主分类号 H01L27/146
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