发明名称 THERMAL PROCESSING SYSTEM, THERMAL PROCESSING METHOD AND PROGRAM
摘要 A heat system, a heat method, and a program are provided to perform efficiently a heat treatment process by using an optimum value produced from an optimization process. A temperature calculating computer(4) includes a communication unit(41), a device database(42), a storage unit(43), and a control unit(44). The communication unit performs communication between heating apparatuses through a LAN(8). The device database includes a hard disk device, and is formed to store a temperature correcting table. The storage unit stores an operational program of the control unit and performs a function of a working area for the control unit. The control unit is operated in accordance with the control program stored in the storage unit.
申请公布号 KR20080080451(A) 申请公布日期 2008.09.04
申请号 KR20080018850 申请日期 2008.02.29
申请人 TOKYO ELECTRON LIMITED 发明人 KOYAMA NORIAKI;WANG WENLING
分类号 H01L21/324 主分类号 H01L21/324
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