| 摘要 |
PROBLEM TO BE SOLVED: To definitely discharge static electricity left in a wafer before lifting up the wafer from a block of an electrostatic chuck with a lift pin. SOLUTION: The system is provided with the block 2 that attracts and holds a substrate 1 with static electricity, a lift pin 3 that lifts the substrate 1 after attraction and holding are released from a lower side and removes the same from the block, and a remaining static electricity discharging mechanism (ring 4 and pin 5) that continuously floats one portion of the substrate 1 along a circle with the center of a substrate surface as a center from the block 2. COPYRIGHT: (C)2008,JPO&INPIT |
