| 摘要 |
PROBLEM TO BE SOLVED: To perform correction of machine difference for every optical system of an electron microscope without complicating it. SOLUTION: In this electron microscope equipped with a condenser lens 111 to focus electron beams emitted from an electron gun 110, a diaphragm 152 to remove an unnecessary region, an objective lens 115 to irradiate the electron beams onto a sample 141 as a microscopic spot, a detector 130 to detect a signal generated from the sample, a signal amplifying converter 230, a memory part 261 to memorize the signal, and a display part 262 to display the memorized signal, a diaphragm plate 150 in which a plurality of the diaphragms 152 are formed, and an objective diaphragm moving unit 250 to move the diaphragm plate 150 are provided, and either one of a plurality of the diaphragms 151-153 can be selected. COPYRIGHT: (C)2008,JPO&INPIT
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