INTERPOSER WITH CAPACITOR MOUNTED THEREON AND METHOD FOR MANUFACTURING THE INTERPOSER

摘要

An interposer (100) having a capacitor mounted thereon is provided with a plug substrate (10) whereupon a via plug (12) is formed, and a capacitor substrate (20) whereupon the capacitor is formed. The capacitor substrate (20) is provided with a substrate main body (21); a capacitor (22) formed on the main surface of the substrate main body; a cover insulating film (25) for covering the capacitor; a terminal electrode (26), which is connected to an electrode of the capacitor and formed on the surface of the cover insulating film; an electrode pad (24) formed on the rear surface of the substrate main body; and a via plug (23) for connecting the terminal electrode and the electrode pad. The plug substrate (10) is provided with a substrate main body (11); an electrode pad (13) formed on the main surface of the substrate main body by corresponding to the terminal electrode of the capacitor substrate; and the via plug (12), which penetrates the substrate main body and is connected to the electrode pad.