| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma gun capable of preventing an insulated tube arranged on a plasma spouting port from being damaged by heat of plasma. <P>SOLUTION: In the plasma gun having negative electrode sections 1a, 1f, and 1g for generating plasma and a return electrode section for making electrons reflected from the target return to a power source while discharging the plasma 6 generated by the negative electrode section in a target direction, the return electrode section is constituted to have a frame 1e forming a plasma outlet, the insulated tube 1h for electrically insulating the surface of the plasma outlet, and a gas flow passage formed to discharge gas toward an end of the insulated tube in the target direction. The gas flow passage includes a cover section 93 having a hole connected with the plasma outlet and forming a flow passage space in the inside of the frame by sticking on the inside of the frame opposite to the target direction, a gas injection passage 91, and a plurality of gas discharge passages 92. <P>COPYRIGHT: (C)2008,JPO&INPIT |
