| 摘要 |
A catadioptric projection objective includes a plurality of optical elements arranged to image an off-axis object field arranged in an object surface onto an off-axis image field arranged in an image surface of the projection objective. The optical elements form a first, refractive objective part generating a first intermediate image from radiation coming from the object surface and including a first pupil surface; a second objective part including at least one concave mirror imaging the first intermediate image into a second intermediate image and including a second pupil surface optically conjugated to the first pupil surface; and a third, refractive objective part imaging the second intermediate image onto the image surface and including a third pupil surface optically conjugated to the first and second pupil surface. The optical elements arranged between the object surface and the first pupil surface form a Fourier lens group which includes a negative lens group arranged optically close to the first pupil surface. |
