| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a parallel drive type electro-mechanical resonator capable of varying a height of electrodes as needed and maintaining an electrode strength. <P>SOLUTION: An electro-mechanical resonator includes a plurality of fixed electrodes constituted of the same layer on a side surface of a vibrator and gaps constituted between the vibrator and the fixed electrodes and is characterized in that a part of a width of the gaps has a spreading area. The electro-mechanical resonator includes a resonance section comprising the fixed electrodes and the vibrator formed via the gaps to the fixed electrodes, and has an area different in the gap width, in a thickness direction of the fixed electrodes. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
