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发明名称
Self aligned method of forming a semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling, and a memory array made thereby
摘要
申请公布号
KR100855885(B1)
申请公布日期
2008.09.03
申请号
KR20010058313
申请日期
2001.09.20
申请人
发明人
分类号
H01L27/115;H01L21/28;H01L21/336;H01L21/8239;H01L21/8247;H01L29/423;H01L29/76;H01L29/788;H01L29/792
主分类号
H01L27/115
代理机构
代理人
主权项
地址
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