| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning method of the measuring position of a scanning probe microscope, capable of performing positioning at a high speed with high precision, by eliminating the positional shift caused by the coarse operation of a Z-coarse adjustment part, at positioning of the probe at the measuring position in the scanning probe microscope. SOLUTION: The positioning method of the measuring position of the scanning probe microscope includes a step S1 for deciding the measuring position set to the measuring surface of a sample 12 by the movement due to XYZ sample stages (11, 14 and 15) and the photographing operation of a TV camera 19 or the like; a step S2 for separating a probe 20 from the sample by the moving operation of the Z fine adjustment mechanism 23 of XYZ fine adjustment mechanisms (23 and 29); a step S3 for moving the probe to the measuring position on the measuring surface of the sample by the moving operation of an XY stage mechanism 14; and a step S4 for allowing the probe to approach the sample by the moving operation of the Z fine adjustment mechanism. COPYRIGHT: (C)2007,JPO&INPIT
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