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发明名称
曝光设备及装置制造方法
摘要
一包含投射光学系统且被组构来经由该投射光学系统而使基板暴露于光之曝光设备包含一支撑架,被组构来支撑投射光学系统;一物件,系藉由该支撑架来予以支撑,且可相对于该支撑架而移动;一致动器,被组构来驱动该物件;一侦测器,被组构来侦测该物件与该支撑架之间的相对位置:以及一控制器,被组构而根据该侦测器的输出来实施该致动器的控制,以致使该物件随着该支撑架而动。该控制器被组构而根据该侦测器的输出,与致使该物件随着该支撑架而动之该控制并行地实施该支撑架之振动的估算。
申请公布号
TW200836022
申请公布日期
2008.09.01
申请号
TW096149005
申请日期
2007.12.20
申请人
佳能股份有限公司
发明人
藤井宏文;伊藤浩司;井上充
分类号
G03F7/23(2006.01)
主分类号
G03F7/23(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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